Synthesis, etching and surface modification (nanomaterials)

[List of equipements]

 

Thin films and nanomaterial synthesis:

- Pulsed Laser Deposition, conventional PLD

- Automated Pulsed Laser Deposition, PVD3000

- E-beam evaporator, Kurt J. Lesker AXXIS

- Sputtering, Kurt J. Lesker CMS-18

- Automated Spin-coater, Site Services Spinball

- Spin-coater, Brewer CEE100

- PECVD, Oxford Instruments

 

Nanometric etching:

- ICP Chlorine Etcher, Oxford Instruments PlasmaLab System100

- ICP Fuorine Etcher, Oxford Instruments PlasmaLab System100

- ICP Deep Silicon Etcher, Oxford Instruments PlasmaLab System100

- Asher Gasonics Aura 1000

 

Ion implantation and surface treatments:

- Ion implanter, IMC 200

- Furnace Tystar Tytan

- Rapid Thermal Annealing (RTA) AG610

- Polishing Machine CP3000

- Polishing Machine Ultra Tec MultiPol

- Wet Benches Reynolds Tech and Fineline

 

Other :

- Dicing Saw, DAD3350