> Laser Writer DWL-66 FS

Manufacturer : Heidelberg


Role of the equipment

   The Heidelberg DWL 66FS is a laser lithography tool able to define and position patterns on a wafer with resolutions close to a micrometer.


Technical specifications

• Resolution: 0.8 µm for isolated lines, 1 µm for dense lines
• Alignement precision: from 200 nm to 2000 nm depending on the resolution
• Diode Laser, wavelength: 405 nm
• Writing speed: from 1 mm²/min to 290 mm²/min depending on the resolution
• Standards CAD formats like GDSII, DXF, GERBER, CIF, etc… are accepted



• 3D grayscale lithography (32 tones)


Examples of available processes and services

• Writing of chrome photomasks
• Direct writing of photonic structures

Academic | Private sector Rate :
75 $/h | 150 $/h



Photomask detail obtained by Laser-Writer Lithography
and dry etching of Cr


Contact : LMN