Manufacturer : Kurt J. Lesker
Role of the equipment
The K. J. Lesker AXXIS evaporator is a versatile thin film deposition toool. Its horizontal chamber maintain the sample at a central position which allow rotating and/or angle deposition. Moreover, the sample can be rotated face up to achieve sputtering deposition, toward the chamber side to use a ion beam or face down for evapostion.
• Source 1: Electron beam with 4 crucibles with automatic selection.
• Water cooled sample holder.
Examples of available processes and services
• Multi-layer deposition of metals for microwave circuits with ion beam pre-cleaning
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