Manufacturer : Ion Beam Services
Role of the equipment
The ion implanter is used to introduce small quantities of ions in a chosen matrix of material. These ions are used to induce electrical, mechanical and/or magnetical changes on the physical properties of the target material.
• Modified Varian CF3000 implanter
• Cassette to cassette system for 100 mm wafers
Examples of available processes and services
• Transistor source and drain implantation
Academic | Private sector Rate :