Manufacturer : AG associates
Role of the equipment
The RTA is used to activate physical reactions (change film-to-film or film-to-wafer substrate interfaces, densify deposited films, activate dopants, , etc..) without allowing the appearance of slow phenomenon like thermal diffusion. This process also allow to grow very thin oxyde layers in a controlled manner.
• Quartz chamber
• Temperature reading by thermocouple or pyromter
Examples of available processes and services
• Ohmic contact annealing
Academic | Private sector Rate :