> Scanning Electron Microscope (SEM)

Model : Tescan Vega3 LMH


Role of the equipment

 Scanning electronic microscopy by secondaries electrons.
Characteraization by energy dispersive spectroscopy (EDS).


Technical specifications

• Electrons gun:
- Thermoionic (Tungsten filament)
- Accelerating voltage : 200 V to 30 kV
• Probe current : 1 pA to 2 uA
• Resolution : 3 nm at 30 kV
• Magnification : 2.5X to 1,000,000X



• X-Ray detector for EDS analysis (all elements from Carbon) - Quantax from Bruker
• Electron backscatter diffraction detector (EBSD of EDAX, with TEAM software)

• Metal sputter coater for non-conductive sample


Examples of available processes and services

• Secondaries (SEI) electrons imaging
• Identification and quantification of the elements by EDS

• Mapping of the cristallographical orientation of teh sample surface by EBSD