> Ellipsometer M-2000

Manufacturer: J.A. Woollam


Role of the equipment

   The M-2000 ellipsometer from Woollam allows fast analysis of thin films on different substrates.


Technical specifications

• Wavelength: 370 nm to1000 nm.
• 3D cartography
• Substrate holder: from small pieces up to 150 mm wafers.



• Focusing probes to reach 150 µm resolution


Examples of available processes and services

• Photoresist thickness measurement
• Quantification of thin films uniformity (thickness, optical constants)

Academic | Private sector Rate :
35 $/h | 105 $/h