Manufacturer : J.A. Woollam
Role of the equipment
The V-VASE ellipsometer from Woollam is high precision tool for the analysis of thin films deposited on opaque or transparent substrates.
• Wavelength: from 240 nm to2500 nm (0.05 nm resolution)
• Ellipsometric analysis as a function of temperature: from 20ºC to 300ºC
Examples of available processes and services
• Thickness measurement of anisotropic thin films
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