Manufacturers : Reynolds Tech, Fineline
Role of the equipment
The wet benches are used for every processes involving chemical products such as sample cleaning, ebeam resist development, wet etching or lift-off processes used for the fabrication of electrodes.
• 3 different benches: one Reynolds Tech (stainless steel) for solvants, two Fineline (plastic) for acids and bases
• Cooled bath (down to 0°C) for cold development of ebeam resists
Examples of available processes and services
• Sample cleaning (Piranha, RCA1 and RCA2 processes)
Academic | Private sector Rate :