The V-VASE ellipsometer from Woollam is high precision tool for the analysis of thin films deposited on opaque or transparent substrates.
• Wavelength: from 240 nm to2500 nm (0.05 nm resolution)
• Mesurements in reflection or transmission
• Micrometric substrate holder able to cover a 45 mm x 45 mm surface on 150 mm wafers (maximum size)
• Ellipsometric analysis as a function of temperature: from 20ºC to 300ºC
• Auto-timer for depolarization measurement
• Focusing probes for 100 µm probe size
• Thickness measurement of anisotropic thin films
• Dielectric lens optical transmission measurement
