[List of equipements]
Thin films and nanomaterial synthesis:
- Pulsed Laser Deposition, conventional PLD
- Automated Pulsed Laser Deposition, PVD3000
- E-beam evaporator, Kurt J. Lesker AXXIS
- Sputtering, Kurt J. Lesker CMS-18
- Automated Spin-coater, Site Services Spinball
- Spin-coater, Brewer CEE100
- PECVD, Oxford Instruments
- Atomic Layer Deposition (ALD), Veeco Savannah 100
Nanometric etching:
- ICP Chlorine Etcher, Oxford Instruments PlasmaLab System100
- ICP Fuorine Etcher, Oxford Instruments PlasmaLab System100
- ICP Deep Silicon Etcher, Oxford Instruments PlasmaLab System100
- Asher Gasonics Aura 1000
Ion implantation and surface treatments:
- Ion implanter, IMC 200
- Furnace Tystar Tytan
- Rapid Thermal Annealing (RTA) AG610
- Polishing Machine CP3000
- Polishing Machine Ultra Tec MultiPol
- Wet Benches Reynolds Tech and Fineline
Other :
- Dicing Saw, DAD3350
