Role of the equipment
Structure analysis of epitaxial layers.
The sample can be moved following Omega, Phi, Psi, X, Y and Z thanks to the 4 circles cradle.
Technical specifications
• CuKα1 X-Rays source, l = 1.54056 Å
• 4 bounds Hybrid Monochromator (Ge 220, 19 arcsec)
• Detector : gas proportionnal
• 2 bounds monochromator triple axis (Ge 220, 12 arcsec)
• 4 circles cradle :
- 2θ = -10º to150º
- Ω = -90º to+90º
- Φ = 0º to360º
- Ψ = -90º to+90º
- X and Y : 100 mm displacement
- Z : 11 mm displacement
Accessories
• Epitaxy software
Examples of available processes and services
• Reciprocal space mapping (RSM)
• Pole figure
• Rocking curve
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