Manufacturer : Heidelberg
Role of the equipmentThe Heidelberg DWL 66FS is a laser lithography tool able to define and position patterns on a wafer with resolutions close to a micrometer.
Technical specifications• Resolution: 0.8 µm for isolated lines, 1 µm for dense lines
Accessories• 3D grayscale lithography (32 tones)
Examples of available processes and services• Writing of chrome photomasks |
Academic | Private sector Rate : |