Role of the equipment
The Ambios XP-2 surface profiler is a stylus profiler for mesuring sub-micrometric features and save profiles numerically.
Technical specifications
• 150 x 178 mm Motorized stage
• Maximum single scan length : 60 mm, possibility to stich the scans up to 150 mm
• Stylus force : 0.5 to 10 mg programmable
• Sample thickness 30 mm max, vertical range : 400 um max
• Vertical resolution : 1 Å at 10 um, 15 Å at 100 um.
• 3D rendering and stress measurement software
• Scan acquisition in a numeric format
Accessories
• Color CCD Camera with motorized zoom 40-160 x
• Vibration isolation system (Herzan DT-6050MV)
• 200 mm removable precision wafer stress chuck
• 1 micron and 100 nm NIST certified step height standards
• 40 degree 2, 1 and 0.2 um stylus
Examples of available processes and services
• Etch depth and lithography pattern measurement
• Thin film stress mesurement
• Surface roughness characterization
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