Archives: Fiche technique

Probe Station Summit 12000

Probe Station Alessi 4500

Wire-bonder KS4523

Prism Coupler 2010

Ellipsometer VVASE

Ellipsometer M-2000

Linear and nonlinear characterization of Nanophotonic devices

Optical pulse shaping and characterization

Electro-optical Characterizations

Ambios XP-2 Profiler

Optical Microscope with digital acquisition

Scanning Electron Microscope (Clean room SEM)

Scanning Electron Microscope (SEM)

Atomic Force Microscope (AFM) XE-150

Variable Temperature UHV STM / AFM Scanning Probe Microscope (SPM)

Ultra-Hight Vacuum Scanning Probe Microscope (SPM)

Enviroscope – Scanning Probe Microscope (AFM)

Multimode Scanning Probe Microscope (AFM / STM)

Focused Ion beam and Scanning Electron Microscope (FIB/SEM)

Ultrafast Transmission Electron Microscope (UTEM)

Dynamic Transmission Electron Microscope (DTEM)

X-Rays Diffractometer (XRD Bruker)

X-Rays Diffractometer (XRD Panalytical)

High resolution X-Rays Diffractometer (HR-XRD Panalytical)

X-Ray and Hard X-Ray Photoelectron Spectroscope (XPS/HAXPES)

Dicing Saw DAD3350

Wet Benches

Polishing Machine Ultra Tec MultiPol

Chemical Polishing Machine CP3000

RTA (Rapid Thermal Annealing) Heatpulse AG610

Furnace Tystar Tytan

Ion implanter IMC-200

Asher Gasonics Aura 1000

Deep Silicon ICP Etcher

Fluorine ICP Etcher

Chlorine ICP Etcher

Atomic Layer Deposition (ALD)

Plasma Enhanced Chemical Vapor Deposition (PECVD)

Spin-Coater Brewer CEE100

Spin-Coater SpinBall