The M-2000 ellipsometer from Woollam allows fast analysis of thin films on different substrates.
• Wavelength: 370 nm to1000 nm.
• 3D cartography
• Substrate holder: from small pieces up to 150 mm wafers.
• Focusing probes to reach 150 µm resolution
• Photoresist thickness measurement
• Quantification of thin films uniformity (thickness, optical constants)
