Scanning electronic microscopy by secondaries electrons.
Characteraization by energy dispersive spectroscopy (EDS).
• Electrons gun:
– Thermoionic (Tungsten filament)
– Accelerating voltage : 200 V to 30 kV
• Probe current : 1 pA to 2 uA
• Resolution : 3 nm at 30 kV
• Magnification : 2.5X to 1,000,000X
• X-Ray detector for EDS analysis (all elements from Carbon) – Quantax from Bruker
• Electron backscatter diffraction detector (EBSD of EDAX, with TEAM software)
• Metal sputter coater for non-conductive sample
• Secondaries (SEI) electrons imaging
• Identification and quantification of the elements by EDS
• Mapping of the cristallographical orientation of teh sample surface by EBSD
