> Nuclear Micoanalysis Station (RBS and ERD)

Role of the equipment

   The nuclear microanalysis station is based on a 400 kV particle accelerator. This station includes the elastic recoil detection (ERD) and the Rutherford Backscattering Spectroscopy (RBS) techniques. These methods allow the depth profiling of elements in materials. Generally, they are quantitative and non destructive.

Technical specifications

   The ERD ExB method is an adaptation of the ERD technique with an electromagnetic filter. The RNS method allow the depth profiling of elements heavier than carbon. The specifications of these techniques are review in the next table.

Accessories

   This station permit the use of the Proton induced x-ray emission (PIXE) technique and nuclear reactions (NR and (p,g)). However, because of the low energy delivered by the accelerator (400 keV), the use of these techniques is limited.

Examples of available processes and services

   Characterization of a SiC_x layer deposited by PECVD on aSi substrate. The measurement shows that the layer is not stoichiometric and contains H. The interface between the layer and the Si substrate is also visible.